Method and apparatus for coating the top of an electrical device

ABSTRACT

A method and apparatus for dispensing a thin coating of a highly viscous encapsulant liquid on to the top surface of a semiconductor device having been inner lead bonded. The coating is dispensed with a controlled thickness and is substantially planar. A liquid encapsulant having optimum thermal, chemical and mechanical properties is selected for protecting the electrical device and which is suitably controlled in an automated liquid dispensed process. The process is directed to various parameters which are required for achieving the desired quality, reliability, and automatic processing capability.

This is a division, of application Ser. No. 07/303,512, filed Jan. 27,1989, now U.S. Pat. No. 5,019,409.

BACKGROUND OF THE INVENTION

The present invention is directed to the provision of a thin coat ofencapsulant on the top surface of an electrical device such as asemiconductor chip having bumps on the top of the chip bonded to anelectrical interconnect medium such as the inner leads of a tapeautomated bonded (TAB) tape frame. The purpose of the coating is toprovide mechanical scratch protection for the passivation layer of thedevice, mechanical support for the inner lead bonds, and shielding fromgross chemical contamination. Several prior art processes which havebeen suggested for higher density packaging and replacement of standardmolded single chip packages are (1) a "glob" coating of a high viscosityliquid encapsulant or (2) a thin coating of a low viscosity liquidencapsulant, both applied to the top surface of the chip forming asingle top coating. A single top coating has the advantage of protectingthe chip while allowing for higher density packaging and for directcooling of the chip through its back side thus not thermally insulatingthe chip. However, the prior art processes possess many disadvantages.The application of a high viscosity material as a "glob" coatingproduces a coating which is very thick in the center (typically 20 to 50mils) and thin at the edges, while the application of low viscosity orsolvent cut materials produce a coating which is undesirably thin at theedges and which drips to the back side of the chip. The addition ofsolvents requires extra processing for removal and may cause bubbling.Both of these processes lack the ability to control the materialcoverage which result in running, nonplanarity, no shape control, nothickness control, and incomplete surface coverage particularly in thecorners. These materials utilized in combination with the lack ofdimensional flow control for these processes result in inferiorreliability particularly for larger devices due to large thermalstresses induced on the device.

The present invention is directed to encapsulating the top of a chipafter inner lead bonding and prior to outer lead bonding and is directedto dispensing a thin coating of a high viscosity liquid encapsulant as asemi-planar, for example, plus or minus 1.5 mils, coating with acontrolled average thickness, preferably between 3 and 6 mils. Theencapsulant completely covers the entire top surface of the chipincluding the corners and the area around and beneath the inner leadbonds.

SUMMARY

One feature of the present invention is a process and apparatus whichallows dispensing a highly viscous liquid encapsulant, that is, onehaving a viscosity of greater than 15,000 c.p.s. as a thin semi-planarcoating. The viscous encapsulant may be solventless and may containfiller particles. The present process advantageously allows theencapsulant to be dispensed without requiring heating of theencapsulant. Attempts have been made to heat viscous epoxy encapsulants,before glob top dispense (20 to 50 mils thickness), to reduce theirviscosity and improve flow; however, heating also significantly reducesthe pot life of the material and also results in a difficult process tocontrol. Sometimes solvent has been added to reduce viscosity but thisis highly undesirable as it significantly reduces processing time andmay cause bubbles or voids when removed. On the other hand, lowviscosity liquids have a tendency to run, do not have planarity or shapecontrol, do not provide complete coverage, in particular the corners ofthe chip, the encapsulant runs to the bottom side of the chip, andtypically the thickness is uncontrollable.

Another feature is that the present process allows the use of a highlyviscous liquid encapsulant which contains filler particles whichimproves reliability by reducing thermal expansion and reduces stress inthe coating.

Another object of the present invention is the provision of the abilityof the present process and apparatus to control the dispensed coatingthickness and planarity by controlling important parameters such as thedispense pattern design, spacing, dispense pressure, dispense speed,dispense tip diameter, tip distance from chip, and chip temperature.Tests show that coatings of substantially 15 mils or thicker resulted indegradation of chip reliability due to stress related failures. Thinnessand planarity become important for maintaining a low profile for furtherprocessing such as face down outer lead bonding.

A still further feature of the present invention is that the apparatusand process allow a complete coverage of the top of the chip andparticularly the corners with the encapsulant. Typically, encapsulant,when applied as a thin coating, rounds away from the corners. Thepresent process overcomes this problem by controlling its operatingparameters thereby eliminating problems created when using liquidencapsulants.

A further advantage of the present process is the provision oftechniques providing a simple quick process setup. The dispense pressureof the encapsulant is dependent upon its viscosity which variessignificantly from batch to batch and during storage. A setup procedureallows the required dispense pressure to be determined from a quickdispense test and thus tight control over the viscosity of theencapsulant is not required.

One object of the present invention is the provision of a method ofencapsulating the top of an electrical device by heating the electricaldevice to reduce the viscosity of an applied encapsulant which has aninitial viscosity of greater than 15,000 c.p.s. The encapsulant isdispensed in a plurality of separated concentric lines onto the top ofthe heated electrical device by pressure through a needle while movingthe needle relative to the top, and thereafter heating and gelling theliquid encapsulant. The encapsulant may be applied at ambienttemperature without heating, may contain a filler, and may besolventless.

Another object of the present invention is wherein the method includesheating the electrical device on a plate having a temperature ofsubstantially 75° C. or greater while dispensing the encapsulant forinsuring complete wetting of the surface and flow between the lines ofthe dispensed encapsulant to provide the desired planarity and coverage.

Another object of the present invention is the provision of a dispensepattern wherein a needle, while dispensing the encapsulant, movesrelative to the top of the electrical device in a plurality of equallyspaced concentric lines from the center to the perimeter of the top.Other important parameters include: the spacing of the lines of theapplied encapsulant substantially equal to the inner diameter of theneedle, and in the range of approximately 6 to 14 mils for a 10 milorifice, for providing planarity, the distance of the bottom end of theneedle from the top of the electrical device is no greater thansubstantially 15 mils for insuring a continuous, uniform dispersal ofthe encapsulant, and the diameter of the needle is approximately 10 to20 mils.

Still a further object is wherein the movement of the needle relative tothe top stops or dwells at the corners of the top in order to insurecomplete coverage after gelling.

Still a further object of the present invention is wherein the pressurefor dispensing the encapsulant ranges from about 20 psi to about 65 psiand is varied in response to the viscosity of the encapsulant.Preferably, for each new supply of encapsulant, a test is run and theweight of the dispensed encapsulant is measured and thereafter thepressure to be applied to the encapsulant is adjusted as a function ofthe measured weight.

Yet a further object is the provision wherein the final line around theperimeter of the top is dispensed with the inner diameter of the needlecorrectly aligned over the outer edge of the top for insuring the fullcoverage of the perimeter.

Yet a still further object of the present invention is the provision ofan apparatus for encapsulating the top of an electrical device in a tapewhich includes a track for movably carrying the tape. A preheat stationis positioned over the track for removing moisture from the device, andan encapsulation dispensing station is downstream from the preheatstation. The encapsulation station includes a heater positioned belowthe track for heating an electrical device placed thereon for reducingthe viscosity of dispensed encapsulant, and a pressure actuated epoxydispenser positioned above the heater and is movable to dispense aliquid epoxy encapsulant in a plurality of separated concentric lines onto the top of an electrical device positioned on the heater. A gelstation is positioned downstream from the encapsulation station forheating and solidifying the dispensed epoxy.

Preferably the dispenser is movable relative to the top of theelectrical device in a concentric pattern from the center to theperimeter of the top. The speed of movement of the needle increases fromthe center to the perimeter. Preferably a vacuum suction is connected tothe heater for holding an electrical device against the heater.

Yet a still further object of the present invention is the provision ofa thin coat ecapsulated TAB chip which includes an electrical integratedcircuit chip having a plurality of leads with their inner ends bonded tothe top of the chip. A coat of solventless epoxy, initially having aviscosity of greater than 15,000 c.p.s., and having a thickness of lessthan 15 mils and being substantially planar, is positioned on the topsurface of the chip and completely covers the corners and edges of thetop. Preferably, the epoxy coating contains a filler and the averagethickness of the coating is in the range of about 3 to 6 mils with aplanarity of about plus or minus 1.5 mils on the top surface of thechip.

Other and further objects, features and advantages will be apparent fromthe following description of a presently preferred embodiment of theinvention, given for the purpose of disclosure and taken in conjunctionwith the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is an elevational cross-sectional view of the thin chip coatencapsulation of an inner lead bonded device coated by the presentapparatus and process,

FIG. 2 is an elevational view of the encapsulation system of the presentinvention,

FIG. 3 is a top elevational view of the preferred dispense pattern ofthe encapsulant onto the top of the electrical device,

FIG. 4 is an example of a graph used to determine the dispense pressureof the encapsulant,

FIG. 5 is a cross-sectional view taken along the line 5--5 of FIG. 2,

FIG. 6 is a cross-sectional view taken along the line 6--6 of FIG. 2,

FIG. 7 is a cross-sectional view taken along the line 7--7 of FIG. 6,

FIG. 8 is an enlarged cross-sectional view taken along the line 8--8 ofFIG. 2,

FIG. 9 is a cross-sectional view taken along the line 9--9 of FIG. 8,

FIG. 10 is a cross-sectional view taken along the line 10--10 of FIG. 8,

FIG. 11 is a cross-sectional view taken along the line 11--11 of FIG.12,

FIG. 12 is a cross-sectional view taken along the line 12--12 of FIG.11,

FIG. 13 is a summary of the baseline parameter settings of the presentinvention, and

FIG. 14 is a table setting forth various variations in some of theparameters.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

Turning now to the drawings, and particularly to FIG. 1, the referencenumeral 10 generally indicates a conventional electrical device such asa semiconductor chip 12 having a plurality of bumps 18 which are bondedto the inner leads 16 of an electrical interconnect medium, such as aTAB tape frame. The present invention is directed to an apparatus andprocess to dispense a thin coating of a liquid encapsulant coating 20onto the top surface of an electrical device such as a chip or asemiconductor 12. The coating 20 covers the passivation layer and thearea around and beneath the inner lead bonds. The top 22 of the coating20 is semi-planar, preferably plus or minus 1.5 mils and has acontrolled average thickness, preferably between 3 and 6 mils. Thepurpose of the coating 20 is to provide mechanical protection for thepassivation layer, mechanical support for the inner lead bonds, andshielding from gross chemical contamination. The bottom or back surface23 of the chip 12 is not coated to allow for direct cooling of the chip,to maintain a low profile to allow for high density bonding of the outerleads of the beam leads 14, and to minimize processing costs by applyinga single top coat which does not require further chip packaging.

Various attempts have been made in the past to encapsulate the top of asemiconductor device with coating. First, attempts have been made toapply viscous epoxy encapsulants dispensing a "glob" coating (20 to 50mils thickness) in the center and covering the chip. Tests indicate thatcoatings of substantially 15 mils or thicker result in degradation ofreliability of large devices due to stress related failures. A glob topcoating for larger devices (greater than 62,500 square mils) results infailures due to cracking of the passivation coating, metal lines, or thechip. Attempts to lower the viscosity and thus produce a thinner coatingusing the center glob dispense method include heating of the encapsulantand addition of solvents. Heating the encapsulant reduces its pot lifeand the flow control of coatings dispensed in the center is difficult tocontrol. Adding solvent only creates the additional problem of removingthe solvent during the process, and solvent frequently causes othercoating defects.

Attempts have been made to provide coating of low viscosityencapsulants, for example silicones or unfilled epoxies, which whileproducing thin coatings frequently do not provide complete coverage ofthe chip, or run to the bottom of the chip, frequently wet the bottom ofthe chip, and are uncontrollable. The use of low viscosity encapsulantsgenerally result in poor reliability when applied to large devices dueto large thermal stresses. All types of liquid encapsulants when appliedto the top surface of a device typically round away from the corners ofthe device during cure of the material, resulting in incomplete coverageand protection.

The present process and apparatus allows dispensing a highly viscoussolventless liquid encapsulant which may contain filler particles as athin semi-planar coating. Material possessing viscosities of greaterthan 15,000 c.p.s. have been dispensed successfully providing a tightcontrol of the dispensed coating thickness and planarity, providingcomplete coverage of the top of the device including the corners, andthe encapsulated chips' reliability was enhanced. The material selectedfor this thin chip-coat application is a major factor contributing tothe final product quality and reliability. Approximately thirty-twomaterials were evaluated for their mechanical, electrical, chemical andprocess optimization properties. The majority of these materials wereunsatisfactory, but one of the materials was tested and was satisfactorybased upon both material properties and environmental test results. Thisselected material was a silica filled epoxy sold under the trademarkAbelbond 69-5 epoxy sold by Ablestik Laboratories which had a viscosityof approximately 50,000-80,000 c.p.s. at ambient temperature. Severalother materials were successfully evaluated in terms of processabilitybut were not environmentally tested.

As previously mentioned, the present encapsulation process involves thesteps of preclean, preheat, encapsulant dispense, encapsulation gel, andfinal cure.

Referring now to FIG. 2, a lab scale system generally indicated by thereference numeral 30 is shown which includes a preheat station generallyindicated by the reference numeral 32, and an encapsulant dispensestation generally indicated by the reference numeral 34, a gel stationgenerally indicated by the reference numeral 36, and a reel-to-reelhandling track generally indicated by 38. Additional equipment (notshown) required to automate the process would include a preclean unitupstream of the preheat station 32 and a curing oven downstream of thegel station 36.

Encapsulation of a contaminated chip surface could lead to severereliability problems. The two cleaning techniques employed in theprocess include plasma etch and UV-ozone. These are conventional systemsand the plasma system was purchased from March Corporation and theUV-ozone system was purchased from Uvocs. Both cleaning systems aresmall batch units. The oxygen plasma unit was utilized for cleaningparts in strip form after the inner lead bonds of the TAB were connectedto the chips. The UV-ozone unit was used when higher volumes of deviceswere encapsulated in reel-to-reel form. Since the batch unit could notbe used to clean chips which had been inner lead bonded in reel form,the sawn chips were cleaned in the system after saw, and just prior toILB. If devices are encapsulated in reel form or on carriers using anautomated system, it is recommended that a UV-ozone system be installedin-line in the encapsulation system 30.

The system 30 includes an input reel 39 in which the chips 12 havingbeen inner lead bonded at tape ends 16 to a TAB tape 31, such as 35 mm.which moves through the track 38 to a takeup reel 40 while aconventional interleaver 42 moves from reel 39 to reel 40 simultaneouslywith the tape 31. The handling track 38 guides the 35 mm. tape withinner leads bonded devices through the stations 32, 34, and 36. In thelaboratory system, the tape 31 was manually advanced through the system30, but the system may be automated if desired.

Referring now to FIGS. 2, 5, 6 and 7, the structure of the preheatstation 32 may best be seen. The purpose of the preheat station 32 is toeliminate moisture on the surface of the chip 12 prior to encapsulation.Also, preheating the die 12 reduces the thermal shock experienced by thedie when it is subjected to the heated base stage in the encapsulationstation 34. The preheat station 32 is a tunnel-like shell which coversthe track 38. Heat is supplied by two infrared tubes 44 suspended in thetunnel above the track 38. The tunnel heater 32 rests on the edge of thehandling track and is aligned through several dowel pins 46. Nitrogen isintroduced into the top center of the heater station 32 through conduit50 and diffused across plate 48. The tunnel heater is double walledhaving an outside wall 52 and an inside wall 54 to provide thermalinsulation between the heating station 32 and the surroundingatmosphere. Temperature uniformity in the preheat station 32 is notcritical and the goal is to maintain a temperature above 105° C. toremove moisture, but below the 125° C. preferred temperature of theheater base stage in station 34.

Referring now to FIGS. 1, 8, 9, 10, 11 and 12, the dispense station 34is provided to repeatedly dispense a thin coating of encapsulant overthe top surface of the chip 12. A thin coat of encapsulant is dispensedby applying pressure to a prefilled, preferably plastic syringe 60having a needle tip 62 (FIG. 12), which moves across the top surface ofthe chip 12 in a controlled repeat pattern. The plastic syringe 60 isdisposable, eliminating messy cleanups. A micro-processor controls adispense robot arm (FIG. 11) for movement in the X, Y and Z directions.A Model 104 by BSI Industries, Inc. may be provided to support andcontrol the movement of the syringe 60 and needle 62. Themicro-processor includes a program consisting of X, Y and Z coordinates,speed parameters, dwell options, and on and off pressure and vacuumvalves.

Various variables control the success of the dispense portion of theprocess, which will be more fully discussed hereinafter, includingdispense needle orifice size, z-height distance, device temperature,dispense pressure, dispense speed, dwell time, initial coordinates,pattern design, which refers to choice of repeating pattern, and thespacing between each line of the pattern.

Referring now to FIGS. 8 and 9, the 35 mm. tape 31 moves through thetrack 38 carrying the ILB'ed chips 12 into the dispensing station 34which positions the tape over a base stage 70. The alignment of the chip12 in the X and Y axis is achieved through the use of the sprocket holes33 along the edge of the tape 31. The designated sprocket holes arevisually centered over alignment holes 72 in the die stage 70 by theoperator. An alignment arm 74 is movable both rotationally andvertically by means of a knob 76. The alignment arm 74 includes a window78 for allowing dispensing the encapsulant onto the chip 12 and alsoincludes pawls 80 which pass through the sprocket holes 33 of the tape31 into the alignment holes 72. The alignment arm 74 may be moved by theknob 76 manually which releases the locking pin 82 from the slot 84.Thus, as best seen in FIG. 8, the alignment arm 74 may be raised andmoved to the dotted position to allow movement of the tape 31 along thetrack to bring an uncovered chip into alignment with the holes 72 andunder the robot arm. Thereafter, the alignment arm 74 is moved back tothe position shown in solid outline in FIGS. 8 and 9 for aligning thechip 12 correctly in the X and Y directions.

As best seen in FIG. 9, the base stage 70 includes a vacuum suction line86 leading to the underside of a chip 12 positioned properly in the Xand Y directions. The vacuum draws the chip 12 flush downwardly with thedie stage 70 in order to properly position the chip 12 in the Zdirection relative to the dispensing needle 62 as will be more fullydiscussed hereinafter.

In order to dispense a highly viscous material as a thin semi-planarcoating, various ways of reducing the viscosity of the encapsulant toimprove its flow characteristics were considered. It is known that byheating the encapsulant a significant decrease in viscosity is provided.However, a main disadvantage of heating the encapsulant material isdecreasing the pot life. For example, heating the Ablebond epoxy to 40°C. shortened the process pot life of the material by about 80% which wasunacceptable. Instead, the flow of the encapsulant was improved byheating the chip 12 prior to dispensing the encapsulant thereon. Theencapsulant is then heated as it contacts the warm surface of the chip,which decreases its viscosity and improves the flow and planarizationcharacteristics of the coating before gel. Since the encapsulant isimmediately gelled, reduction of pot life after dispense is not anissue, as it was for encapsulant heating prior to dispense.

Referring again to FIG. 9, the heated stage 70, to which the chip 12 wasaligned, is provided with preferably two heaters 88 mounted in the stage70 just below the surface where the chip 12 rests. A thermo-couple 90 ismounted in the stage 70 just below the surface where the chip 12 rests.Preferably, for the Ablebond epoxy, the temperature of the stage 70 isset at 125° C. In actuality, the temperature at the surface of the chip12 is about 110° C. when dispensation begins. If the temperature of thestage 70 is set below 75° C., the flow characteristics are notadequately improved for the established base line process for theAblebond epoxy; the lines of the dispensed pattern do not wet together,resulting in a non-planar final coat.

Referring now to FIGS. 11 and 12, a pressure fitting 96 is attached tothe top of the syringe 60 for applying pressure into the syringe 60 andforcing the encapsulant through the dispense needle 62. The pressure iscontrolled by the controller 64 (FIG. 2). The pressure setting requiredto achieve the desired average 3 to 6 mil coating varies with the flowcharacteristics or viscosity of the encapsulant material.

Preferably, the syringes 60 are prefilled with the encapsulant, but ithas been found that the flow characteristics of the encapsulant may varyfor each syringe of material. Therefore, a different pressure settingmay be required for each syringe of material. Therefore, the parameterof pressure remains a variable in the established baseline process.Since a variable is not desirable, a simple technique that could beperformed by the setup operator, in less than five minutes, is providedfor determining the pressure for each syringe so that the process isviable for a manufacturing environment.

First, a trial and error method is utilized to determine pressure forthe particular encapsulant used. The pressure is set at a trial value,then the encapsulation program run, the coating gelled, and finally thethickness of the coating measured. The steps are repeated until thecorrect pressure is found which produced the desired coating thickness.This method is not feasible for a process which is in production as itis very time-consuming and wasteful. However, the results of the trialand error method are used to develop the graph in FIG. 4 or amathematical equation to establish the relationship between the weightof encapsulant dispensed and the dispensed pressure. Any value betweenthe lines 100 and 102 is satisfactory.

The graph shown in FIG. 4 is specific to the Ablebond 69-5 epoxy. Forother encapsulants a different graph would have to be provided.

A pressure dispensed technique was selected over the commonly usedvolume dispense method for several reasons. The volume dispense methodutilizes a precision valve to control the total volume of materialdispensed for "glob" top applications. Pressure dispense allows acontrol rate or quantity of material to be placed along each line of thepattern as a function of the needle size and speed. This quantity ofmaterial is varied by both the pressure used to displace the material,and the flow characteristics or viscosity of the material. The totalvolume of material dispensed is not significant, instead the resultingthickness and planarity of coating is critical. For example, the factthat twice as much material would be dispensed for a 6 mil coatingversus the 3 mil coating is not a concern as long as the planarity iswithin 1.5 mils, since the average coating thickness is within thedesired range of 3 to 6 mils.

The volume dispense method would guarantee dispension of a totalcontrolled volume of material. For a given dispense pattern, as theviscosity of the material varied, the resulting thickness and planarityof the coating would be unacceptable using this technique.

The second reason a pressure dispense is selected over a volume orpiston displacement technique is to mimimize costly, inadequatelycleaned parts. An inexpensive, disposable plastic syringe and dispenseneedle are implemented and thus the material never comes in contact withany parts of the encapsulation system, thus no messy cleanup or flushingare required, and no expensive non-disposable parts are lost after thematerial has built up and cured within a small precision volume dispensechamber.

In order to determine the pressure required for a given syringe ofmaterial, a "flow test" is performed. The flow test determines the flowcharacteristics of the encapsulant using the weight measurement of thematerial which is dispensed under standard conditions for a specifiedperiod of time. A silicon blank is weighed and a test pattern isdispensed onto the blank. The encapsulant weight is subtracted from theoriginal weight of the blank thereby providing the resulting "flowweight". Using this measured "flow weight", the graph in FIG. 4 isconsulted and the pressure is determined from that graph which willproduce the desired thickness. For example, if the measured "flowweight" is 16 mg., the dispensed pressure would then be set between 39and 45 psi. Since the viscosity of the encapsulant varies significantlybetween lots of materials and as the material ages, the present processuses a test to indirectly measure the viscosity and account for thevariations by adjusting the dispense pressure.

Another parameter is the inner diameter of the dispense needle 62. Thisdiameter is an important factor in determining the quantity of materialwhich is dispensed along each line of the dispense pattern. Changing theinner diameter results in significant changes in the coating thickness.Preferably, in the baseline process for the Ablebond epoxy, thepreferred diameter was 10 mils, although a range from about 10 to 20mils is satisfactory. One of the factors limiting the minimum dispensediameter is not the viscosity of the material, but the size of anyfiller particles used in the encapsulant. For example, the 25 gaugeneedle (inner diameter of 10 mils) utilized for the Ablebond 69-5 epoxycould not be used for some other types of epoxy materials because offrequent needle clogging. In these instances, due to larger fillerparticles, the larger gauge needle is used.

The encapsulant material cannot be globbed onto the center of the chip12 and achieve the goal of a thin semi-planar coating 20. Instead, thinlines of material are laid onto the surface of the chip 12, which flowtogether forming an evenly-distributed thin coating across any sizechip. There are several aspects of the dispense pattern which determinethe final thickness and coverage of the coating. These aspects includethe pattern, pattern spacing, and initial coordinates. The concentricpattern, as best seen in FIG. 3, provided a pattern 104 consisting of aplurality of concentrically equally spaced lines in which the patternoriginated in the center at end 106 and spiraled outwardly to the outerend 108. This pattern was optimal based upon the planarity profile andconsistent coverage along the perimeter of the chip 12. Other types ofpattern were acceptable, though harder to control. An unacceptablepattern involved reversing the pattern and starting at the end 108 andending at the end 106, resulted in a profile with a high centerpoint.

Another important aspect of the dispense pattern is the spacing betweenadjacent concentric lines for a specified needle orifice diameter.Initially the spacing was set at 20 mils for a 10 mil orifice whichproduced a questionable surface planarity even though the thickness wasin the target range. This spacing did not allow the material to flowtogether or planarize between the individual pattern lines, leaving avery distinct pattern in the surface of the coating. In additionaltests, the preferable spacing pattern was 10 mils for a 10 mil orificealthough acceptable results were obtained in the range from about 6 milsto 14 mils. Generally, the spacing is substantially equal to the innerdiameter of the needle.

Therefore, the preferred dispense program begins at the center of thechip 12 and a concentric pattern is generated with 10 mil spacingbetween lines to within 10 to 20 mils of the perimeter of the chip 12.The final loop of the pattern 104 is placed with the inner diameter ofthe dispense needle 62 aligned over each edge of the chip 12 by a mil ortwo. The acceptable pattern spacing is increased as needle's orificediameter increases.

While the planarity of the encapsulant coating is controlled by thedispense pattern and pattern spacing as discussed, another importantparameter determining the overall planarity is the speed of the dispenseneedle 62 as it travels along each loop of the defined dispense pattern104 in the X and Y directions. The speed is varied as the X and Y axismotors decelerate and accelerate when changing travel directions causinga high spot to be formed in the center where the pattern lines are shortand/or incomplete coverage along the perimeter of the chip 12 where thepattern lines are long. This effect can be overcome by varying the speedof the travel by increasing the speed at the center of the chip anddecreasing the speed around the perimeter of the chip. Using thevariations of speed available from the controller 64, of about 3.3inches per second maximum at the center to the minimum of 0.4 inches persecond along the perimeter, a satisfactory planarity was obtained.

Complete surface coverage is essential for optimum protection of thechip 12. Initially inspection of the cured encapsulated device 12indicated the material was pulling away from the outer corners duringgel. Although the needle 62 decelerates and accelerates as it changesdirection, this time frame did not allow for dispensation of enoughmaterial to fill and remain in the corner areas after gel. Therefore,the needle 62 was stopped at the corners along the perimeter to providea dwell time of 75 ms. at the four outer corners which provided thedesirable corner coverage for the device and TAB tape design which wastested. This parameter is dependent upon the distance of the bumps 18from the edge of the chip 12 and the spacing of the tape leads 16 fromthe corner of the chip 12.

The Z-height parameter is another important parameter which must becontrolled. The term "Z-height" refers to the distance between thebottom tip of the dispense needle 62 and the top surface of the chip 12.If the tip 62 is too close to the chip 12, physical damage to the bondsor passivation layer occurs. If the dispense tip 62 is too far from thechip, continuous lines of encapsulant will not be placed on the chip 12,but rather discrete blobs of material will break off creating anon-planar coating with incomplete coverage. Difference in the Z heightoccurs because of the differences in the length of the needle 62 whichwere found to vary up to 50 mils, and each time a needle and syringe isloaded into the apparatus, its positional accuracy can vary by severalmils. An acceptable base line Z-height is 10 mils and experimentalfindings indicate that a distance of substantially no greater than 15mils is the maximum acceptable distance for the Ablebond epoxy. Becauseof the many factors contributing to the variable of the Z-heightdistance, the controller 64 was modified to allow for the physicaladjustment of the Z-axis microswitch and a fixture provides a referenceplane.

Referring now to FIGS. 8, 10, 11 and 12, the controller 64 (FIG. 2)utilizes a microswitch 110 to locate the home position in the Z axis. Asnoted in FIG. 12, a Z axis motor 112 operates a screw 114 to raise andlower an attachment plate 116 for holding the syringe 60. Actuation ofthe microswitch 110 by the plate 116 determines the home position of theneedle 62 in the Z direction. However, the Z position of the microswitch110 can be physically adjusted. That is, the microswitch 110 isconnected to a bar 118 pivoting around a bolt 120 at one end. The secondend of the bar 118 is connected to a threaded insert 122 which isthreadedly connected to an adjustment screw 124. The second end of thebar 118 is also connected to a spring 126. Therefore, adjustment of thescrew 124 changes the Z position of the microswitch 110.

Referring now to FIGS. 8 and 10, an alignment fixture generallyindicated by the reference numeral 130 is provided and included aspring-loaded plate 132, connected to a dial gauge 134, which is used asthe reference Z-plane for alignment. An alignment step is run each timea new syringe 60 is loaded into the holder. The dispense needle 62 ismoved a fixed distance in the Z plane above the plate 132. For correctalignment, the dispense needle 62 should contact the plate 132 and pushit downwardly until the dial gauge 134 is reading 0 mils plus or minus0.5 mil. If the end of the needle 62 is not correctly aligned, the Zaxis microswitch 110 is mechanically adjusted by the screw 124 (FIG. 12)and the alignment program is rerun for verification.

After the chip 12 has been covered with the liquid encapsulant at thedispense station 34, it moves to the gel station 36. The purpose of thegel station is to partially polymerize the epoxy encapsulant to allowsubsequent reeling or stacking of the devices for complete cure in anoven. Adequate gelling is achieved when the coating is tack-free andwon't deform upon subsequent handling. The gelling of the selectedencapsulant is time and temperature dependent. A short gel time,preferably less than 10 minutes, at gel temperature is desired. The gelstation 36 is basically the same structure as the preheat station 32 butpossesses separate heating and nitrogen controls. For the Abelbond 69-5epoxy, each of the devices 10 is gelled for 8 minutes at a geltemperature above 120° C. which provided satisfactory gel time.

The final cure cycle of the process is the cycle recommended by thevendor of the material. The cure cycle for the Abelbond 69-5 epoxy is100° C. for 2 hours plus 150° C. for 1/2 hour. The encapsulated chip 12on the tape 31 is reeled upon the reel 40 and is cured in any suitableoven.

After the parameters of the process were determined, a base line processwas established. Referring now to FIG. 13, the summary of the baselineprocess parameter settings is listed except for the dispense pressurewhich must be determined for each new supply of dispensing encapsulant.The baseline parameters were established by individual experiments inwhich a single parameter was varied while all the other parameters wereheld at their ideal baseline values. However, these results producedlimited knowledge of the process window since they do not take intoconsideration the interactions between the parameters.

Therefore, a matrix experiment was generated which held the processindependent variables constant, while taking the dependent parametervariations into consideration. The independent process variables includepattern design 12, needle orifice diameter (10 mils), and encapsulantmaterial (Ablebond 69-5 epoxy), while the parameters which displaysignificant interaction or dependency include dispense pressure, chipstage temperature, dispense pattern spacing between lines, and Z-height.The dependent variables settings were reevaluated and modified slightlyfor each independent variable change, such as evaluation of variousmaterials. The dependent parameter variations and the result of thisexperiment are shown in FIG. 14. Not all combinations of parametervariations produce desirable encapsulant coatings in this experiment.For example, a decrease of the dispense pattern spacing to 6 milsproduced extremely thick coatings, except when the pressure also wasdecreased by 10 psi. Combining a decrease of 10 psi and pressure fromthe ideal setting, with an increase in pattern spacing or an increase inZ-height distance produced undesirably thin coatings with unacceptablecoverage. In addition, an increase of 10 psi in pressure from the idealsetting resulted in coatings above the desirable thickness, except whenthe pattern spacing was increased.

Therefore, the present apparatus and process allows dispensing a highlyviscous solventless liquid encapsulant as a thin semi-planar coating inwhich the encapsulant does not require heating before dispense, theprocess provides for tight control of the dispense coating thickness andplanarity, provides complete covering of the corners of the chip withthe encapsulant, defines the important parameters of the process, andprovides a coating in which the test results indicated that the coatingmaintained or enhanced the performance of the chip with no degredationresulting from the coating.

The present invention, therefore, is well adapted to carry out theobjects and attain the ends and advantages mentioned as well as othersinherent therein. While a presently preferred embodiment of theinvention has been given for the purpose of disclosure, numerous changesin the details of construction and arrangement of parts, and steps ofthe process, will be readily apparent to those skilled in the art, andwhich are encompassed within the spirit of the invention and the scopeof the appended claims.

What is claimed is:
 1. An apparatus for encapsulating the top of anelectrical device in a tape comprising,a track for movably carrying saidtape, a preheat station over the track for removing moisture from thedevice, an encapsulation dispensing station downstream from the preheatstation, said encapsulation station includes,a heater positioned belowthe track for heating an electrical device placed thereon for reducingthe viscosity of applied encapsulant, a pressure actuated epoxydispenser positioned above the heater and above the track and means formoving said dispenser in a continuous line and in a plurality ofseparated concentric lines for dispensing a liquid epoxy encapsulantonto the top of an electrical device positioned on the heater, and a gelstation downstream from the encapsulation station for heating andsolidifying the dispensed epoxy.
 2. The apparatus of claim 1 wherein thedispenser is movable relative to the top of the electrical device in aconcentric movement from the center to the perimeter of the top.
 3. Theapparatus of claim 1 wherein the needle has an inner diameter of about10 to 20 mils, the dispenser spaces the lines substantially equal tosaid inner diameter, and the distance of the bottom of the needle fromthe top of the electrical device is no greater than about 15 mils. 4.The apparatus of claim 1 wherein the speed of the dispenser relative tothe top decreases from the center to the perimeter.
 5. The apparatus ofclaim 1 wherein the movement of the dispenser relative to the top of theelectrical device stops at the corners of the top.
 6. The apparatus ofclaim 1 wherein the pressure of the dispenser ranges from about 20 psito about 65 psi and is increased in response to increasing viscosity ofthe epoxy.
 7. In an apparatus for encapsulating the top of an electricaldevice having a preheat station for removing moisture from the device, aheater for heating the electrical device for reducing the viscosity ofapplied encapsulant, and a gel station for heating and solidifying thedispensed encapsulant, the improvement in an encapsulation dispensingstation positioned between the preheat station and the gel station foruniformly coating the top of the electrical device, comprising,apressure actuated epoxy dispenser, and means for moving said dispenserrelative to the top of the electrical device in a concentric movementfrom the center to the perimeter of the top for dispensing a liquidepoxy encapsulant in a continuous line forming a plurality of separatedconcentric lines onto the top of the electrical device.
 8. The apparatusof claim 7 wherein the speed of the dispenser relative to the topdecreases from the center to the perimeter.
 9. The apparatus of claim 7wherein the movement of the dispenser relative to the top of theelectrical device stops at the corners of the top.
 10. The apparatus ofclaim 7 wherein the needle has an inner diameter of about 10 to 20 mils,the dispenser spaces the lines substantially equal to said innerdiameter, and the distance of the bottom of the needle from the top ofthe electrical device is no greater than about 15 mils.